发明名称 IN-CHAMBER FLUID HANDLING SYSTEM AND METHODS HANDLING FLUIDS USING THE SAME
摘要 A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured to introduce a carrier gas into the sample region from a first position and a second position within the sample chamber such that at least a portion of the sample is entrainable by the carrier gas within the sample region. A portion of the sample region is located between the first position and the second position. A sample transport conduit is configured to transport at least a portion of the sample entrained by the carrier gas to a location outside the sample chamber.
申请公布号 EP2954300(A1) 申请公布日期 2015.12.16
申请号 EP20140749219 申请日期 2014.02.06
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 HILLIARD, SHANE;O'CONNOR, CIARAN, J.;WILKINS, JAY;LARSEN, ERIK;SUMMERFIELD, LEIF
分类号 G01N1/22;G01N1/38;G01N35/08;H01J49/04 主分类号 G01N1/22
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