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发明名称
在针对半导体应用之整合群集系统中形成互连结构的方法;METHODS FOR FORMING INTERCONNECTION STRUCTURES IN AN INTEGRATED CLUSTER SYSTEM FOR SEMICONDUCTOR APPLICATIONS
摘要
本发明之实施例提供用于在不破坏真空的情况下以最小氧化/大气暴露来形成半导体元件中之互连结构之方法。在一个实施例中,用于形成半导体元件之互连结构之方法包括:将阻障层蚀刻气体混合物供应至安置有基板之第一处理腔室中,以蚀刻阻障层中由图案化金属层暴露之部分,直至暴露该下层基板为止,该第一处理腔室安置于处理系统中;以及在第二处理腔室中于该基板上形成覆盖该经蚀刻阻障层的衬里层,该第二处理腔室安置于该处理系统中。
申请公布号
TW201546876
申请公布日期
2015.12.16
申请号
TW104107769
申请日期
2015.03.11
申请人
应用材料股份有限公司 APPLIED MATERIALS, INC.
发明人
那克美荷B NAIK, MEHUL B.;奈马尼史林尼法斯D NEMANI, SRINIVAS D.;越泽武仁 KOSHIZAWA, TAKEHITO;任河 REN, HE
分类号
H01L21/02(2006.01);H01L21/321(2006.01);H01L21/768(2006.01)
主分类号
H01L21/02(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
美国 US
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