LASER IRRADIATION DEVICE AND METHOD FOR DIAGNOSING INTEGRITY OF LASER IRRADIATION HEAD

摘要

A laser irradiation device (100, 200) comprises a laser oscillator (1), a laser irradiation head (3) that performs laser processing by directing the laser beam onto the region to be processed; and a transmission mechanism (2) that gets the laser beam through emitted from the laser oscillator (1) to the laser irradiation head (3). The laser irradiation head (3) comprises: a laser beam adjustment unit (13) that adjusts the laser light to create a laser beam; a protective glass window (15) arranged in an emission region that emits the laser beam; a reflection mechanism (14) that gets the laser beam through and reflects visible light; a wavelength-dependent optical screening mechanism (18) that cuts off light of a wavelength region other than visible light from the light that is reflected by the reflection mechanism (14); an image adjustment lens unit (20) that adjusts an image comprising visible light that is input from the wavelength-dependent optical screening mechanism (18); an image pickup camera (21) that inputs an image; and an image processing mechanism (22) that processes the image.