HARMFUL GAS PURIFIER, HARMFUL GAS PURIFYING METHOD AND HIGH-FREQUENCY HIGH VOLTAGE GENERATING UNIT

摘要

PROBLEM TO BE SOLVED: To provide a highly efficiency harmful gas purifier without need for a special medium such as ammonia and with the electron beam irradiation region being the same as the reaction region of the exhaust gas even if the purifier is small-sized. SOLUTION: This harmful gas purifier is provided with a high-frequency high voltage generating unit for generating a high-frequency high voltage signal, an electron beam emitting cell having an electrode, an electron beam pole having a reaction hole opposed to the electrode and a reaction unit 100 having a passage for the exhaust gas between the electron beam emitting cell and electron beam pole. The reaction unit 100 generates an electron beam between the electrode and reaction hole in accordance with the high-frequency high voltage signal from the high-frequency high voltage unit, the exhaust gas passing through the inside of the reaction region of the gas passage is irradiated with the electron beam, and the harmful component contained in the exhaust gas is made harmless.