| 发明名称 | Micro mechanical structure and method for fabricating the same | ||
| 摘要 | A micro mechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure further includes a conductive base layer having a conductive base layer material. The conductive base layer material includes sectionally in a stiffening section a carbon material such that a carbon concentration of the carbon material in the conductive base layer material is at least 1014 per cubic cm and at least higher by a factor of 103 than in the conductive base layer material adjacent to the stiffening section. | ||
| 申请公布号 | US9212045(B1) | 申请公布日期 | 2015.12.15 |
| 申请号 | US201414448783 | 申请日期 | 2014.07.31 |
| 申请人 | Infineon Technologies AG | 发明人 | Schmid Ulrich;Frischmuth Tobias;Irsigler Peter;Grille Thomas;Maurer Daniel;Hedenig Ursula;Kahn Markus;Denifl Guenter |
| 分类号 | H01L29/66;B81B3/00;B81C1/00 | 主分类号 | H01L29/66 |
| 代理机构 | Slater & Matsil, L.L.P. | 代理人 | Slater & Matsil, L.L.P. |
| 主权项 | 1. A micro mechanical structure comprising: a substrate; and a functional structure arranged at the substrate; wherein the functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region; wherein the functional structure comprises a conductive base layer having a conductive base layer material; and wherein the conductive base layer material comprises sectionally in a stiffening section a carbon material such that a carbon concentration of the carbon material in the conductive base layer material is at least 1014 particles per cm3 and at least higher by a factor of 103 than in the conductive base layer material adjacent to the stiffening section. | ||
| 地址 | Neubiberg DE | ||