Apparatus for treating substrate by applying chemical solution on substrate using plural rollers

摘要

An apparatus for treating a substrate including a plurality of transfer rollers configured to transfer a substrate and simultaneously to be rotated to wet a back surface of the substrate; a plurality of chemical solution supply tanks configured to receive the chemical solution therein, the plurality of the chemical solution supply tanks arranged under the plurality of the transfer rollers, respectively, with being spaced apart a predetermined distance from each other; a main tank configured to surround the plurality of the chemical solution supply tanks; and an exhaustion unit configured to suck and exhaust fume generated in the process of wetting the back surface with the chemical solution and liquid drops of the chemical solution.

主权项

1. An apparatus for treating a substrate, comprising:
a plurality of transfer rollers configured to be rotated in order to transfer the substrate and simultaneously to wet a back surface of the substrate; a plurality of chemical solution supply tanks configured to receive a chemical solution therein, the plurality of the chemical solution supply tanks arranged under the plurality of the transfer rollers, respectively, with being spaced apart a predetermined distance from each other; a main tank configured to surround the plurality of the chemical solution supply tanks; an exhaustion unit configured to suck and exhaust fume generated in the process of wetting the back surface with the chemical solution and liquid drops of the chemical solution; a front tank installed adjacent to a side of the main tank to supply the chemical solution to each chemical solution supply tank, wherein the front tank rotatably supports each transfer roller; and a chemical solution supply unit configured to supply the chemical solution to the front tank.