Size-controllable opening and method of making same

摘要

A support structure includes an internal cavity. An elastic membrane extends to divide the internal cavity into a first chamber and a second chamber. The elastic membrane includes a nanometric-sized pin hole extending there through to interconnect the first chamber to the second chamber. The elastic membrane is formed of a first electrode film and a second electrode film separated by a piezo insulating film. Electrical connection leads are provided to support application of a bias current to the first and second electrode films of the elastic membrane. In response to an applied bias current, the elastic membrane deforms by bending in a direction towards one of the first and second chambers so as to produce an increase in a diameter of the pin hole.

主权项

1. Apparatus, comprising:
a support structure including an internal cavity within the support structure; and an elastic membrane extending to divide the internal cavity into a first chamber and a second chamber, the elastic membrane including a pin hole extending there through to interconnect the first chamber to the second chamber; wherein the elastic membrane includes a first electrode film and a second electrode film separated by an insulating film, said elastic membrane configured to respond to an application of bias current of a first polarity to the first and second electrode films by bending in a direction towards the first chamber to increase a diameter of the pin hole; and wherein said elastic membrane is further configured to respond to application of bias current of a second, opposite, polarity to the first and second electrode films by bending in a direction towards the second chamber to increase the diameter of the pin hole.