Microbolometer for infrared detector or terahertz detector and method for manufacturing the same

摘要

A microbolometer includes a micro-bridge structure for uncooling infrared or terahertz detectors. The thermistor and light absorbing materials of the micro-bridge structure are the vanadium oxide-carbon nanotube composite film formed by one-dimensional carbon nanotubes and two-dimensional vanadium oxide film. The micro-bridge is a three-layer sandwich structure consisting of a layer of amorphous silicon nitride base film as the supporting and insulating layer of the micro-bridge, a layer or multi-layer of vanadium oxide-carbon nanotube composite film in the middle of the micro-bridge as the heat sensitive and light absorbing layer of the microbolometer, and a layer of amorphous silicon nitride top film as the stress control layer and passivation of the heat sensitive film. The microbolometer and method for manufacturing the same can overcome the shortcomings of the prior art, improve the performance of the device, reduce the cost of raw materials and is suitable for large-scale industrial production.

主权项

1. A microbolometer, comprising a three-layer sandwich micro-bridge structure, wherein the micro-bridge structure comprising a first layer of amorphous silicon nitride film as a supporting and insulating layer, at least a layer of vanadium oxide-carbon nanotube composite film provided on the first layer of amorphous silicon nitride film as a heat sensitive and light absorbing layer, and a second layer of amorphous silicon nitride film provided on the layer of vanadium oxide-carbon nanotube composite film as a passivation and stress control layer,
wherein the layer of vanadium oxide-carbon nanotube composite film, having a continuous two-dimensional film structure, is formed by one-dimensional carbon nanotubes and two-dimensional vanadium oxide film, wherein the two-dimensional vanadium oxide film is a main part and the one-dimensional carbon nanotubes is additives.