Graphene-transferring member, graphene transferrer, method of transferring graphene, and methods of fabricating graphene device by using the same

摘要

Graphene transferring members, graphene transferrer, methods of transferring graphene, and methods of fabricating a graphene device, may include a metal thin-film layer pattern and a graphene layer sequentially stacked on an adhesive member. The metal thin-film layer and the graphene layer may have the same shape. After transferring the graphene layer onto a transfer-target substrate during the fabrication of a graphene device, the metal thin-film layer is patterned to form electrodes on respective ends of the graphene layer by removing a portion of the metal thin-film layer.

主权项

1. A method of transferring graphene, the method comprising:
sequentially forming a sacrificial layer and a catalyst layer on a substrate; growing a graphene layer on the catalyst layer; forming a metal thin-film layer on the graphene layer; patterning the metal thin-film layer, the graphene layer, and the catalyst layer to form the metal thin-film layer pattern, a graphene layer pattern and a catalyst layer pattern; forming an adhesive layer on the metal thin-film layer; sequentially removing the sacrificial layer and the catalyst layer pattern; and transferring the graphene layer pattern from the adhesive layer onto a transfer-target substrate so that the graphene layer pattern contacts the transfer-target substrate.