MEMS gyroscopes with reduced errors

摘要

In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase and anti-phase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.

主权项

1. A method of operating vibratory gyroscope having a shuttle and a Coriolis accelerometer, the method comprising:
driving, by a first shuttle driver, vibratory motion of the shuttle using a drive signal having alternating phase and anti-phase drive signal periods; and demodulating, by a demodulator, output of the Coriolis accelerometer during equal times of phase and anti-phase drive of the shuttle with respect to a velocity signal used for angular rate demodulation.