发明名称 INFRARED LIGHT SENSITIVE ETCHING OR PLATING RESIST
摘要 PROBLEM TO BE SOLVED: To provide an infrared light sensitive etching or plating resist having high sensitivity, excellent in stability and not requiring an oxygen intercepting film. SOLUTION: The infrared light sensitive etching or plating resist contains a (meth)acrylate monomer having ethylene oxide and/or propylene oxide as a structural unit, an infrared absorbing dye and a polymerization initiator.
申请公布号 JP2001324803(A) 申请公布日期 2001.11.22
申请号 JP20000141085 申请日期 2000.05.15
申请人 MITSUBISHI CHEMICALS CORP 发明人 TAKASAKI RYUICHIRO
分类号 G03F7/027;C08F2/44;C08F2/46;C08F4/52;C08F20/30;C08F290/06;C08K5/00;C08L71/00;G03F7/004;G03F7/029;H05K3/06 主分类号 G03F7/027
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