III-V photonic crystal microlaser bonded on silicon-on-insulator

摘要

Novel methods and systems for miniaturized lasers are described. A photonic crystal is bonded to a silicon-on-insulator wafer. The photonic crystal includes air-holes and can include a waveguide which couples the laser output to a silicon waveguide.

主权项

1. A method for fabricating a photonic crystal microlaser structure, the method comprising:
providing a silicon-on-insulator substrate, the silicon-on-insulator substrate comprising
a silicon substrate;a silicon dioxide layer contacting the silicon substrate; anda silicon layer contacting the silicon dioxide layer; providing a III-V semiconductor substrate; depositing a p-type layer on the III-V semiconductor substrate; depositing a quantum well structure on the p-type layer; depositing an n-type layer on the quantum well structure; bonding the n-type layer to the silicon layer; depositing a first electrode on the III-V semiconductor substrate; defining a mesa structure, the mesa structure comprising
the first electrode;the III-V semiconductor substrate;the quantum well structure;the p-type layer; andthe silicon layer; depositing a second electrode on the n-type layer; defining air-holes in the mesa structure, wherein the mesa structure comprises
a center region,an edge region, anda remaining region, the remaining region having a greater area than the sum area of the center region and of the edge region, and whereinthe air holes are periodically arranged in the remaining region, thereby creating a photonic crystal structure with a resonator and a photonic crystal waveguide; and defining a silicon ridge waveguide, the silicon ridge waveguide being configured to couple to the photonic crystal waveguide.