Microelectromechanical gyroscope with self-calibration function and method of calibrating a microelectromechanical gyroscope

摘要

A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.

主权项

1. A microelectromechanical gyroscope, comprising:
a supporting structure having first and second sensing terminals; a capacitive coupling coupled to the sensing terminals; a sensing mass coupled to the supporting structure through the capacitive coupling, the sensing mass being movable with respect to the supporting structure according to a first degree of freedom and being movable with respect to the supporting structure according to a second degree of freedom in response to rotations of the supporting structure about an axis; driving components configured to maintain the sensing mass in oscillation according to the first degree of freedom; a reading interface connected to the sensing terminals and configured to sense transduction signals indicative of the capacitance between the sensing mass and the supporting structure; and first and second capacitive compensation modules connected to the first and second sensing terminals, respectively, and configured to compensate for a capacitance of the capacitive coupling between the sensing mass and the supporting structure, the first capacitive compensation module having a first variable capacitance coupled to the first sensing terminal, the second capacitive compensation module having a second variable capacitance coupled to the second sensing terminal, and the first and second variable capacitances being distinct from the capacitance of the capacitive coupling between the sensing mass and the supporting structure; and calibration components coupled to the reading interface and configured to detect systematic errors from the transduction signals and to adjust the first and second variable capacitances of the first and second capacitive compensation modules as a function of the transduction signals to mitigate the systematic errors.