Delamination device

摘要

Provided is a delamination device of delaminating a laminated substrate obtained by bonding a first substrate and a second substrate, the laminated substrate being disposed in an opening of a frame, the opening having a diameter larger than that of the laminated substrate, and the laminated substrate being held by the frame with a non-bonding surface of the first substrate attached to a tape provided in the opening. The delamination device includes: a first holding unit configured to hold the second substrate of the laminated substrate from above; a second holding unit configured to hold the first substrate of the laminated substrate from below through the tape; and a moving mechanism configured to move the first holding unit in a direction away from the second holding unit.

主权项

1. A delamination device of delaminating a laminated substrate obtained by bonding a first substrate and a second substrate, the laminated substrate being disposed in an opening of a frame, the opening having a diameter larger than that of the laminated substrate, and the laminated substrate being held by the frame with a bottom surface of the first substrate attached to a tape provided in the opening, the delamination device comprising:
a first holding unit configured to hold the second substrate of the laminated substrate from above; a second holding unit configured to hold the first substrate of the laminated substrate from below through the tape; a moving mechanism configured to move the first holding unit in a direction away from the second holding unit, and a local movement unit including a body and a cylinder, one end of the cylinder being fixed to the body and being vertically moved by the body, wherein the other end of the cylinder is fixed to an outer periphery of the first holding unit such that the outer periphery of the first holding unit is partially pulled in the direction away from the second holding unit when the first holding unit is pulled by the local movement unit, and wherein the first holding unit is made of a material such that the shape of the first holding unit changes to delaminate the second substrate from the first substrate when the first holding unit is pulled by the local movement unit.