Active lateral force stiction self-recovery for microelectromechanical systems devices

摘要

A mechanism for recovering from stiction-related events in a MEMS device through application of a force orthogonal to the stiction force is provided. A small force applied orthogonal to the vector of a stiction force can release the stuck proof mass easier than a force parallel to the vector of the stiction force. Example embodiments provide a vertical parallel plate or comb-fingered lateral actuator to apply the orthogonal force. Alternate embodiments provide a proof mass of a second transducer to impact a stuck MEMS actuator to release stiction.

主权项

1. A method for recovering from a stiction event in a microelectromechanical systems (MEMS) device, the method comprising:
subjecting the MEMS device to a force sufficient to cause stiction between a moving portion of the MEMS device and a fixed portion of the MEMS device, wherein the MEMS device comprises a teeter-totter accelerometer and the moving portion of the MEMS device is a rotating proof mass; exerting a release force to the MEMS device sufficient to release the stiction between the moving portion of the MEMS device and the fixed portion of the MEMS device, wherein
the release force comprises a release force vector orthogonal to a stiction force vector associated with the stiction,said exerting is performed by a component in a package comprising the MEMS device, andthe release force is an electromagnetic force.