| 摘要 |
PROBLEM TO BE SOLVED: To provide an angle error estimation device for estimating the angle error caused by the axial misalignment between the detection axis of a detection unit and the rotation axis of a rotary table, and to provide an encoder including the angle error estimation device.SOLUTION: The encoder 1 includes an encoder body 2, and a signal processor 3 as an angle error estimation device. The signal processor 3 includes an error calculation unit 32 for estimating an angle error δ included in the rotation angle &thetas; of the rotary table on the basis of the phase misalignment between a Z phase signal and an A phase signal that is caused by the axial misalignment. |
