发明名称 |
Pressure transducer and manufacturing method thereof |
摘要 |
A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided. The transducer includes a fixed electrode formed in an upper surface of a substrate and a moving electrode provided in the diaphragm disposed above the fixed electrode through a cavity. The substrate has formed in the bottom thereof at least one hole which is used in a manufacturing process for removing a sacrificial layer formed between the diaphragm and the upper surface of the substrate in dry etching to form the cavity.
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申请公布号 |
US2002093038(A1) |
申请公布日期 |
2002.07.18 |
申请号 |
US20020082318 |
申请日期 |
2002.02.26 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
IKEDA MASAHARU;ESASHI MASAYOSHI |
分类号 |
G01L9/04;G01L9/00;H01L29/84;H04R19/00;H04R19/04;H04R31/00;(IPC1-7):H01L29/76 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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