摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a sealed polymer actuator, capable of reliably and easily sealing a polymer actuator element.SOLUTION: A sealed polymer actuator includes: a polymer actuator element 13 deformed according to a voltage between a pair of electrode layers 12; and a seal member 15 covering the polymer actuator element 13 such that the polymer actuator element is wholly packaged. A method for manufacturing the sealed polymer actuator includes: a resin layer formation step P12 of forming a sealing resin layer J5 serving as the seal member 15 on the polymer actuator element 13; a covering step P13 of applying polysilazane PHPS on the outside of the sealing resin layer J5; and an ultraviolet ray irradiation step P14 of irradiating the polysilazane PHPS with ultraviolet rays to form a silicon oxide film S5 serving as the seal member 15 from the polysilazane PHPS. |