发明名称 A DONOR SUBSTRATE FOR DEPOSITING AN ORGANIC LAYER USING JOULE-HEATING
摘要 The present invention provides a method for producing an organic membrane deposition donor substrate for depositing an organic membrane by using Joule heating, and a donor substrate produced thereby. According to the present invention, a substrate is provided. A conductive metal membrane is deposited and patterned on one surface of the substrate, and a wall layer is formed on the patterned conductive metal membrane. A photoresist is deposited on the wall layer. The patterned conductive metal membrane is used as a mask on an opposite surface on which the conductive metal membrane is deposited, so a photoresist in a region corresponding to the patterned conductive metal membrane is removed through rear surface light exposing treatment. By using the photoresist as a mask, a part corresponding to the conductive metal membrane of the wall is removed through an etching liquid, and the remaining photoresist is removed. By using Joule heating, a uniform organic membrane pattern may be formed when an organic membrane is deposited. In the method for producing a donor substrate, a process is simple, and a wall pattern having excellent pattern precision may be formed.
申请公布号 KR20150139747(A) 申请公布日期 2015.12.14
申请号 KR20140068006 申请日期 2014.06.04
申请人 ENSILTECH CORPORATION 发明人 RO, JAE SANG;HONG, WON EUI;JANG, IN GU;PARK, DOO JUNG;LEE, HAE JIN
分类号 H01L51/56 主分类号 H01L51/56
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