| 发明名称 |
METALIZING CRUCIBLE DEVICE WITH IMPROVED SEALING SUTRUCTURE |
| 摘要 |
The present invention provides a deposition crucible device having an improved sealing structure. The deposition crucible device comprises: a crucible (10) having a heating spatial part in which a deposition material is fed; and a nozzle (20) coupled to cover an upper end opening of the crucible (10), and having a nozzle hole (20h) for discharging steam organic material generated by being heated in the crucible (10). The nozzle (20) and crucible (10) are made of different materials, so a contact surface between the crucible (10) and the nozzle (20) is steadily sealed due to a difference in a heat expansion coefficient between the crucible (10) and the nozzle (20). |
| 申请公布号 |
KR20150139724(A) |
申请公布日期 |
2015.12.14 |
| 申请号 |
KR20140067910 |
申请日期 |
2014.06.03 |
| 申请人 |
SNF |
发明人 |
CHOI, SEUNG HWAN;KIM, JONG HO |
| 分类号 |
H01L51/56;H01L21/22;H01L21/324;H01L21/56 |
主分类号 |
H01L51/56 |
| 代理机构 |
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