METHOD FOR MANUFACTURING VERTICALLY CONDUCTING MAGNETORESISTANCE EFFECT ELEMENT

摘要

PROBLEM TO BE SOLVED: To enable to prevent dispersion of resistance and obtain a high process yield of a magnetoresistance effect element. SOLUTION: A manufacturing method comprises the steps of: forming a lower electrode 2, forming a magnetoresistance effect film 4 including a plurality of layers on the lower electrode; forming a mask 6 on the magnetoresistance effect film; patterning the magnetoresistance effect film with the mask; forming a high resistive film 10 having higher resistance than the magnetoresistance effect film at the side of the magnetoresistance effect film as the mask remain; removing the mask; removing the high resistive film existing on the magnetoresistance effect film; an forming an upper electrode 12 on the magnetoresistance effect film.