发明名称 OPTICAL COMPONENT AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To form an opening hole with high precision without lowering rigidity of a base material in an optical component comprising the base material having the opening hole formed thereon such as a spatial filter, an aperture, a mask or the like and a method for manufacturing the same. SOLUTION: The optical component is characterized by having the base material, a recessing part formed on the one side of the base material and the opening hole, with a diameter smaller than that of the recessing part, formed on the other side of the base material and opening through the base of the recessing part. Also the method for manufacturing the optical component is characterized by having a step to form the recessing part, with a diameter larger than the desired opening hole, on the one side of the base material and a step to form the opening hole, opening through the base of the recessing part, on the other side of the base material.</p>
申请公布号 JP2002202404(A) 申请公布日期 2002.07.19
申请号 JP20000399171 申请日期 2000.12.27
申请人 NIKON CORP 发明人 NAKAMURA JUNJI
分类号 G02B5/00;B23H9/14;G02B7/02;G03F1/00;G03F1/68;(IPC1-7):G02B5/00;G03F1/16 主分类号 G02B5/00
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