ELECTROSTATIC CHUCK AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of discharge inside an electrostatic chuck.SOLUTION: An electrostatic chuck includes: a base plate 10 that includes a through hole 12; a cylindrical insulation part 20 that includes a projection part P projecting from the upper end of the through hole 12 and is inserted into the through hole 12; a placing table 40 that is arranged on the base plate 10; a dent D that is formed on an undersurface of the placing table 40 and has the projection P of the cylindrical insulation part 20 fitted thereto; a concave part C that is formed in the dent D of the placing table 40; an electrode E that is formed in the concave part C of the placing table 40; and a power feeding terminal T that is arranged inside the cylindrical insulation part 20 and connected to the electrode E.