| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect measurement device and defect measurement method that can simultaneously obtain a p-polarization component of scattering light and an s-polarization component thereof even upon using a 90-degree scattering method.SOLUTION: A defect measurement device 100 comprises: a laser oscillator 3 and irradiation optical system 4 that irradiate a first surface F1 of a sample S with laser light; an imaging unit 6 that images light generated from a second surface F2 orthogonal to the first surface F1 of the sample S relative to the laser light with which the sample S is irradiated; a control unit 7 that measures a defect inside the sample S on the basis of an image imaged by the imaging unit 6; and a Wollaston prism 52 that is arranged between the second surface F2 of the sample S and the imaging unit 6, and separate the light generated from the second surface F2 to a p-polarization component and an s-polarization component. |
