| 摘要 |
PROBLEM TO BE SOLVED: To provide an individualization method of an electronic device which suppresses variation of element dimensions.SOLUTION: An individualization method of an electronic device individualizes a plurality of electronic devices by forming scribe marks in parallel with a groove on any other principal surface side of first principal surface and second principal surface facing a groove not relying upon the crystal plane azimuth of a crystal substrate formed by reactive etching on any one principal surface side of the first principal surface of the crystal substrate having a plurality of electronic devices integrated on the first principal surface and the second principal surface on the opposite side of the first principal surface. |
