| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem found in a piezoelectric pump using a piezoelectric vibrator and a check valve that the piezoelectric vibrator could not be driven at a high frequency due to the limit of response performance of the check valve.SOLUTION: This invention comprises a piezoelectric vibrator 5 formed into a rectangular plate-like shape using a piezoelectric member and a vibrator plate that performs a bending action under application of voltage; a pump chamber 36 storing the piezoelectric vibrator 5; casings (1, 3, 7) having a discharging port 31 and a suction port 73 communicating with this pump chamber 36; and a supporting member 6 having a torsion bar 61 supporting the piezoelectric vibrator 5 in the pump chamber 36. The pump chamber 36 is divided into an upper pump region 36a and a lower pump region 36b. When a voltage is applied to the piezoelectric vibrator 5 to cause the piezoelectric vibrator 5 to be bent to face upward in a salient shape, both longitudinal ends of the piezoelectric vibrator 5 are displaced downward to restrict a motion of fluid between the upper pump region 36a and the lower pump region 36b. |
