| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge device having a stable discharge rate.SOLUTION: A venturi tube provided in a vacuum pump 11 and an auxiliary gas supply device 7 for supplying auxiliary gas are connected to a liquid storage container 21. A main gas supply tube 51 for supplying main gas to the venturi tube and an evacuation tube 52 for evacuating the liquid storage container 21 are provided with first and second variable valves 12 and 13 respectively. An auxiliary gas supply tube 54 for supplying the auxiliary gas to the liquid storage container 21 is provided with an auxiliary variable valve 14. The internal pressure of the liquid container 21 can be accurately controlled by adjusting the conductance of the respective variable valves 12-14. |
