| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device including a waterproof cover which prevents slurry and a cleaning fluid etc. from adhering to an inner wall of an exterior door of a housing.SOLUTION: In a polishing device, a polishing part, which presses a substrate to a polishing surface on a polishing table to polish the substrate, is housed in a housing. A waterproof cover 6, which may be removed to the exterior of the device, is provided at the inner side of an exterior door of the housing. |
