| 摘要 |
PROBLEM TO BE SOLVED: To use bearing supply pressure adapted to a hydrostatic bearing different from air pressure for controlling a servo valve, in the servo valve with the hydrostatic bearing.SOLUTION: In a servo valve 10 with a hydrostatic bearing, a bearing gas supply port 54 is formed at a sleeve 40 differently from a controlling gas supply port 50. A spool 20 has an introduction passage 100 which axially extends through the inside of the spool 20 from a one-side opening part 102 connected to an introduction recess 104 opposing the bearing gas supply port 54 of the sleeve 40, and reaches the other side opening part 106 which is opened at the other side land 26. A one-side land 24 of the spool 20 is floated from a sleeve inner wall face by a gas having bearing gas pressure Pwhich is injected from the bearing gas supply port 54, and the other side land 26 is floated from the sleeve inner wall face by the gas having the bearing gas pressure Pwhich is injected from the other side opening part 106 of the other side land 26. |
