| 摘要 |
PROBLEM TO BE SOLVED: To provide a solar battery that can suppress occurrence of a hot spot phenomenon.SOLUTION: A method of manufacturing a solar battery comprises: a step of forming one conduction type first semiconductor layer 12 on a first principal surface 10b of a semiconductor substrate 10; a step of forming an insulation layer 18 on the first semiconductor layer; a step of forming a protection layer 19 on the insulation layer; a step of etching and removing the first semiconductor layer, the insulation layer and the protection layer in an area other than the one conduction type area so that the first semiconductor layer, the insulation layer and the protection layer remain in the one conduction type area; a step of partially etching and removing the side surface 18b of the insulation layer to form a regression area A in which the side surface of the insulation layer regresses to the inside of the side surface of the first semiconductor layer and the side surface of the protection layer; a step of forming another conduction type second semiconductor layer 13 on the semiconductor substrate, the protection layer and first semiconductor layer of the regression area; and a step of etching and removing the protection layer on the insulation layer and the second semiconductor layer. |
