SUBSTRATE DRILLING DEVICE AND SUBSTRATE DRILLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate drilling device and a substrate drilling method that can avoid drilling a hole having a depth based on a wrong position due to malfunction of a sensor for detecting an upper surface of a substrate.SOLUTION: The substrate drilling device includes: a detecting part 10 and a control part. The detecting part 10 detects not only that a substrate pressing part 9 engaging with a spindle 5 has descended to abut to a substrate 1 every time a hole is drilled, but also that the substrate pressing part has ascended to become separated from the substrate 1 after drilling a hole. The control part compares a difference in height position information of the substrate pressing part between the abutment detection and the separation detection by the detecting part with a difference at the time of a previous hole drilling, and performs control so that a subsequent hole drilling is not performed if the difference this time is beyond an allowable range.