发明名称 OPTICAL SYSTEM AND IMAGE MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an optical system having coaxial illumination that suppresses doubling of an image and aberrations caused by insertion of a beam splitter in a path of non-parallel light rays.SOLUTION: An optical system includes a light source unit that emits diffusive light rays, a thin film that reflects the diffusive light rays from the light source unit, and a first lens group that irradiates the light reflected by the thin film as parallel light. The optical system may preferably include a filter that is to be located between the light source unit and the thin film to make uniform irradiation by reducing light intensity of a portion of the diffusive light rays emitted by the light source unit relative to light intensity of the remaining portion thereof.
申请公布号 JP2015225215(A) 申请公布日期 2015.12.14
申请号 JP20140109941 申请日期 2014.05.28
申请人 MITSUTOYO CORP 发明人 NAGAHAMA TATSUYA;SHISHIDO YUKO
分类号 G02B13/00;G02B21/06 主分类号 G02B13/00
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