| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device and a defect inspection method capable of identifying a recessed defect and a projecting defect even when a surface defect has a complicated surface shape.SOLUTION: Calculation means 10 identifies the presence of a surface defect exceeding a predetermined size from a brightness signal waveform at each irradiation position of an inspection object 2. When the surface defect is present, each of a maximum value and a minimum value of brightness in the brightness signal waveform is calculated in the area of the surface defect, the absolute value of difference of each of the adjacent maximum value and minimum value in the brightness signal waveform is compared, and the kind of the surface defect is determined from a change in a test value in an area of a combination in which the absolute value becomes maximum. |
