| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS structure that can reduce electric resistance between a movable electrode and wiring connected to the movable electrode, and to provide an electronic apparatus and a movable body that include the MEMS structure.SOLUTION: The MEMS structure 1 includes: a substrate 2; a lower electrode 51 disposed in the substrate 2; a lower electrode 52 disposed in the substrate 2; a movable part 531 disposed while separated apart from and oppositely to the lower electrode 51; an upper electrode 53 having a stationary part 532 connected to the movable part 531 and fixed with respect to the lower electrode 52; and a metal part 54 coming into contact with both of the stationary part 532 and the lower electrode 52 and including a metal. |
