METHOD AND APPARATUS FOR IRRADIATING LIGHT

摘要

The present invention relates to a light irradiation method. The method includes the following steps: monitoring a state of a process control module; contrasting a monitored state value and a preset reference value; and blocking a path of light irradiated to an object in accordance with the contrast result. The present invention provides the light irradiation method and a light irradiation apparatus, which can monitor whether or not the malfunction of an operating state of the process control module occurs in real time by monitoring a heat beat of the process control module during the process of processing the object by irradiating the light, and prevent the object from being exposed to the light for a long time by blocking the path of the light when the abnormality occurs in the operating state by blocking the path of the light when the abnormality occurs in the operating state.