ELECTROSTATIC DISCHARGE PROTECTION DEVICES

摘要

An electrostatic protective device comprises: a substrate including an active fin extended in a first direction; a plurality of gate structures individually extended in a second direction to form a constant angle with the first direction, and partially covering the active fin; an epitaxial layer which is grown on a recess formed in an active fin part between the gate structures; an impurity region which is formed in a lower part of the epitaxial layer, and in which the thickness of a center unit is formed thicker than the thickness of an edge unit; and a contact plug which is in contact with an upper surface of the epitaxial layer to overlap with the center unit of the impurity region, and to which the external power is applied.