发明名称 ELECTRON RADIATION MONITORING SYSTEM TO PREVENT GOLD SPITTING AND RESIST CROSS-LINKING DURING EVAPORATION
摘要 An electrode system configured to be positioned within a vacuum chamber of an electron-beam metal evaporation and deposition apparatus including a metal slug from which metal is evaporated during operation of the electron-beam metal evaporation and deposition apparatus. The electrode system includes a substantially ring-shaped electrode formed of a conductive material and a plurality of insulating standoffs configured to support the substantially ring-shaped electrode in the vacuum chamber in a position substantially surrounding the metal slug.
申请公布号 HK1174670(A1) 申请公布日期 2015.12.11
申请号 HK20130101587 申请日期 2013.02.05
申请人 SKYWORKS SOLUTIONS INC. 发明人 CHENG, KEZIA
分类号 C23C;G01N 主分类号 C23C
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