发明名称 BASE FILM OF TAPE FOR PROCESS OF SEMICONDUCTOR PRODUCTION
摘要 The present invention relates to a base film of a tape for a process of semiconductor production, which comprises: A) an ionomer resin which is made by bridging a specific binary copolymer with a metal ion; and, B) an ionomer resin made by bridging a specific ternary copolymer with a metal ion. The mass ratio of the substance A) and the substance B) is 50 to 50 through 5 to 95. The base film of a tape for a process of semiconductor production of the present invention is made of a middle layer and external layers on both sides of the middle layer. The middle layer comprises: A) an ionomer resin made by bridging a specific binary copolymer with a metal ion; and, B) an ionomer resin made by bridging a specific ternary copolymer with a metal ion. The mass ratio of the substance A) and the substance B) is 50 to 50 through 5 to 95.
申请公布号 KR20150139458(A) 申请公布日期 2015.12.11
申请号 KR20150077840 申请日期 2015.06.02
申请人 ACHILLES CORPORATION 发明人 KOBAYASHI SHUICHI;MURATA MINORU
分类号 H01L21/683;C09J7/02 主分类号 H01L21/683
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