拨水性保护膜形成用药液,申请号TW100122329-传众专利搜索

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发明名称	拨水性保护膜形成用药液
摘要
申请公布号	TWI512846	申请公布日期	2015.12.11
申请号	TW100122329	申请日期	2011.06.24
申请人	中央硝子股份有限公司	发明人	斋尾崇;公文创一;斋藤真规;荒田忍;七井秀寿
分类号	H01L21/471;H01L21/00	主分类号	H01L21/471
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项	一种拨水性保护膜形成用药液，其系于将表面上具有凹凸图案且该凹凸图案之至少凹部表面含有矽元素之晶圆洗净时，用以于该凹凸图案之至少凹部表面上形成保护膜者，且含有下述通式[1]所示之二烷基矽烷基化合物，不含有酸及硷，[化4]R2(H)SiX [1][式中，R分别相互独立表示选自含有碳数为1~18之烃基之一价有机基、及含有碳数为1~8之氟烷基链之一价有机基中的至少1种基，X为选自卤素基、或-NH-Si(H)R2]。
地址	日本

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