发明名称 DISPOSITIF MICROELECTRONIQUE A TRANCHEES D'ISOLATION DEBORDANT SOUS UNE ZONE ACTIVE
摘要 <p>The device (100) has a substrate (102) including a semiconductor layer (108) positioned on a dielectric layer (106), where the dielectric layer is positioned on another semiconductor layer (104). An isolation trench (114) is made through the former semiconductor layer, the dielectric layer and a part of the thickness of the latter semiconductor layer. The trench including silicon dioxide delimits an active area (110) of the device, where a portion (118) of the silicon dioxide of the trench is positioned under the active area in a part of the thickness of the latter semiconductor layer. An independent claim is also included for a method for producing a microelectronic device.</p>
申请公布号 FR2995137(B1) 申请公布日期 2015.12.11
申请号 FR20120058274 申请日期 2012.09.05
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 VINET MAUD;GRENOUILLET LAURENT;LE TIEC YANNICK;WACQUEZ ROMAIN
分类号 H01L21/76;H01L21/46;H01L27/085 主分类号 H01L21/76
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