| 摘要 |
PURPOSE:To enable a beam of an arbitrary kind of ion to be led out by enabling each of a number of emitter-chip ion source reservoirs packed with a desired ion substance to be positioned facing a fixed ion-leading-out electrode. CONSTITUTION:A number of ion source reservoirs, each including an emitter chip 1, an ion-reservoir supporting member 2, an ion substance 6 and a control electrode 7, are set on a supporting plate 4 rotated according to a turret system in such a manner that each ion source reservoir can face a fixed ion-leading-out electrode 8 including a filament 9. After an arbitrary ion source reservoir is positioned facing the ion-leading-out electrode 8, the chip 1 is heated with electrons discharged from the filament 9 so as to fuse the ion substance 6, thereby leading out an ion beam. As a result, fine-flux ion beams of many kinds of ions can efficiently be led out arbitrarily according to purpose by means of one batch without breaking vacuum. |
