发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device includes a substrate where a cell region, a contact region located around the cell region, a page buffer region, and a scribe lane region are defined; a non-stepped cell structure which is located in the cell region and includes alternately stacked first conductive layers and first insulating layers; a stepped contact structure which is located in the contact region and includes alternately stacked second conductive layers and second insulating layers; a non-stepped first dummy structure which is located in a page buffer region and includes alternately stacked first sacrificial layers and third insulating layers; and a second dummy structure which is located in the scribe lane region and includes alternately stacked second sacrificial layers and fourth insulating layers.
申请公布号 KR20150139357(A) 申请公布日期 2015.12.11
申请号 KR20140067861 申请日期 2014.06.03
申请人 SK HYNIX INC. 发明人 KIM, WON KI;KIM, JONG MAN
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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