PEELING DEVICE, PEELING SYSTEM, PEELING METHOD, AND COMPUTER STORAGE MEDIUM

摘要

According to the present invention, a process of peeling off a substrate to be processed and a support substrate can be properly performed. A peeling device (141) of the present invention includes: a first holding/supporting unit (310) for holding and supporting a support substrate (S) among overlapped substrates (T); a second holding/supporting unit (420) for holding and supporting a substrate (W) to be processed among the overlapped substrates (T); and a moving unit (320) for moving the first holding/supporting unit (310) in a direction to be away from the second holding/supporting unit (420). The first holding/supporting unit (310) includes a plate-like elastic member (311) which is in contact with the moving unit (320), and a plurality of adsorbing units (312) which is installed on the elastic member (311) and adsorbs the support substrate (S). A first moving unit (330) of the moving unit (320) includes a support member (331), a moving mechanism (332), a support plate (333), and a rail (334).