GAS SENSORS USING RHODIUM LOADED WO3 AND FABRICATION METHOD THEREOF

摘要

Provided is a gas sensor and a fabrication method thereof. According to the present invention, a gas sensor is comprised of a gas sensitive layer made of a rhodium (Rh) added tungsten oxide (WO_3). According to the present invention, the present invention may prevent degradation of a gas sensing characteristic of an oxide semiconductor material by moisture and may obtain a high sensitivity and a fast reaction characteristic in a high-humidity atmosphere, such as an outbreath. Such a gas sensor may fabricated easily according to the fabrication method of the present invention.