| 摘要 |
The present invention is to provide an OLED deposition apparatus which can uniformly and quickly perform a thin film deposition process. To solve the objective, the OLED deposition apparatus includes a deposition chamber (10) which is vertically loaded to a deposition substrate (S), a source (20) which is installed to move vertically in the deposition chamber (10), heats a deposition material to deposit the deposition material with regard to the substrate (S), and evaporates the same, and a vertical moving device (30) which moves the source (20) in a vertical direction. Therefore, the thin film deposition process can be carried out in uniform and quick manners. |
