WAFER SPUTTERING DISK AND TRANSFER SYSTEM OF WAFER SPUTTERING DISK

摘要

The present invention provides a wafer sputtering disk, comprising: a disk main body mounted on a susceptor; a disk transfer unit which can be separated with the disk main body and transfer a stored wafer or can be coupled to the disk main body in a semiconductor processing operation. Accordingly, the present invention enables to automate an operation process of configurating the wafer sputtering disk to be coupled or to be separated, and storing or transferring a wafer on the separated wafer sputtering disk.