发明名称 LIFT PIN ASSEMBLY
摘要 Embodiments of lift pin assemblies are provided herein. In some embodiments, a lift pin assembly includes an elongate base formed of a first material and having a first feature formed in a distal end of the base to interface with and removably support a tip; and a tip formed of a second material different than the first material and having a support surface on a first side of the tip and an opposing second side of the tip, wherein the opposing second side includes a second feature to mate with the first feature of the base to removably retain the tip on the distal end of the base.
申请公布号 WO2015187453(A1) 申请公布日期 2015.12.10
申请号 WO2015US32905 申请日期 2015.05.28
申请人 APPLIED MATERIALS, INC. 发明人 CHIA, BONNIE T.;RAVI, JALLEPALLY;KOPPA, MANJUNATHA;PURATHE, VINOD KONDA;TSAI, CHENG-HSIUNG MATTHEW;KAMATH, ARAVIND MIYAR
分类号 H01J37/32;H05H1/46 主分类号 H01J37/32
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