MICROCHANNEL RESONATOR AND MANUFACTURING METHOD THEREFOR

摘要

A method for manufacturing a microchannel resonator capable of measuring the mass and a characteristic of an object by using a principle in which a resonant frequency changes according to the mass of a moving material comprises the steps of: providing a stacked substrate including a lower layer, a middle layer provided on the upper part of the lower layer, and an upper silicon layer provided on the upper part of the middle layer; forming a cavity channel for allowing a material moving in a predetermined depth inside the upper silicon layer to perform a resonant motion; and partially removing the upper silicon layer and the lower layer corresponding to the vicinity of the cavity channel, wherein, according to the partial removal of the upper silicon layer and the lower layer, a hollow micro channel structure including the cavity channel therein and capable of doing a resonant motion for the stacked substrate is formed.