PROBE AND METHOD FOR MANUFACTURING THE PROBE

摘要

A probe for a probe head having lower and upper dies includes a main portion, a conductive portion stacked on at least a part of the main portion, an attachment layer covering the main portion and the conductive portion, a skin effect layer covering the attachment layer, and a stopping portion for being abutted against the lower or upper die. The main portion includes a first material. The conductive portion includes a second material. The skin effect layer includes a third material. The electrical conductivity of the third material is greater than that of the second material. The electrical conductivity of the second material is greater than that of the first material. The hardness of the first material is greater than that of the second material, and also greater than that of the third material.

主权项

1. A probe for being used in a probe head having a lower die and an upper die, the probe comprising:
a main portion; a conductive portion stacked on at least a part of the main portion; an attachment layer covering the main portion and the conductive portion; a skin effect layer covering the attachment layer; and a stopping portion for being abutted against the lower die or the upper die; wherein the main portion comprises a first material; the conductive portion comprises a second material; the skin effect layer comprises a third material; an electrical conductivity of the third material is greater than an electrical conductivity of the second material; the electrical conductivity of the second material is greater than an electrical conductivity of the first material; a hardness of the first material is greater than a hardness of the second material; the hardness of the first material is greater than a hardness of the third material.