发明名称 ROLLER-TYPE PRESSURIZING DEVICE, IMPRINT DEVICE, AND ROLLER-TYPE PRESSURIZING METHOD
摘要 Provided are: a roller-type pressurizing device in which it is possible to minimize unevenness in elastic deformation of the main roller and to uniformly pressurize a subject; an imprint device; and a roller-type pressurizing method. This invention, for pressurizing a subject such as a mold (1) and a molded item (2), comprises: a main roller (37) for pressing the subject, at least the surface of the main roller (37) being formed of an elastic member (37a); a roller movement means for moving the main roller (37) relative to the subject; a pressure adjustment unit for adjusting the pressure applied by the main roller (37) to the subject; a pressure reception stage (322) for receiving the pressure from the main roller (37) through the subject; an intermediate roller (38) for supporting the main roller (37), at least the surface of the intermediate roller (38) being formed of a material having a higher elastic modulus than that of the elastic member (37a); and a backup roller (39) for supporting the intermediate roller (38), the backup roller (39) having an axial length less than those of the main roller (37) and the intermediate roller (38).
申请公布号 WO2015186736(A1) 申请公布日期 2015.12.10
申请号 WO2015JP66026 申请日期 2015.06.03
申请人 SCIVAX CORPORATION 发明人 KAWAGUCHI HIROSUKE;TANIGUCHI YUTAKA;TANAKA SATORU;SAITO YUKIMASA;SUGIYAMA MASAKI;MATONO DAISUKE
分类号 H01L21/027;B29C59/04 主分类号 H01L21/027
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